Preheat oven to 325 °F (160 °C). Grease 6 5-oz (150 mL) ramekins and place a disc of parchment in the bottom of each.
Place ramekins in a dish with a 2-inch (5 cm) lip.
Stir mascarpone to soften. Add sugar and combine well. Stir in whipping cream and vanilla bean paste (or seeds from vanilla bean), switching to a whisk to smooth out mixture.
Whisk in eggs one at a time until blended. Ladle mixture into prepared ramekins and pour hot tap water around ramekins until water comes halfway up.
Bake cheesecakes for 35 minutes (tops of cheesecake will brown to golden), then remove from water bath to cool.
Chill for at least 6 hours before serving.
To make Filo Wafers, increase oven to 350 °F (180 °C) and line a baking tray with parchment. Lay out one sheet of filo and brush lightly with butter and sprinkle with sugar.
Cover with second sheet of filo, repeating with butter and sugar. Repeat with third sheet, then fold filo in half. Cut 6 circles out of pastry with a 3 ½ -inch (8 cm) cookie cutter and place onto baking tray.
Bake for 7 minutes, until golden brown. Let cool.
To serve, place a filo wafer on a dessert plate. Run a spatula around inside of ramekin to loosen, then turn out cheesecake onto wafer.
Peel away parchment disc and sprinkle top of cheesecake with sugar. Using a kitchen butane torch, caramelize top of cheesecake.
Repeat with remaining cheesecakes and serve.